Magnetron Sputtering

VTS, South Korea

Magnetron’s sputtering machine from VTS Korea offers the possibility of three targets enabling co-deposition onto a heated and spun substrate using DC and rf excitation. This is a versatile high vacuum system for synthesizing thin film and multilayered structures for spintronics, electronic and magnetic devices. The device is also fitted with an in-situ crystal thickness monitor that was installed in 2016.